![]() Pressure transmitter and method for transmitting a pressure.
专利摘要:
Hydrogen, which has penetrated from the outside into a pressure transmitter (40), or hydrogen or hydrocarbons are formed inside a pressure transmitter (40), in the Druckleitpfaden (60) to gas bubbles. As a result, the specified value shifts and no correct numeric value is output. A pressure transducer (40) comprises a space (52) formed between a diaphragm (50) and a wall surface (51) on sides of the main part, pressure guide paths (60) connected to the wall surface (51) on sides of the main part are an enclosed liquid (80) trapped in the space (52) and the pressure conducting paths (60) to transfer a pressure received from the membrane (50) to a sensor (130) and a hydrogen absorbing material (90) at least in the trapped liquid (80), on the wall surface (51) on the side of the main part, or in part of the path between the wall surface (51) on the main part side and the sensor (130), to detect hydrogen atoms in the trapped liquid (80) to absorb. The invention also includes a method for transmitting a pressure / differential pressure by a pressure transmitter according to the invention. 公开号:CH707090B1 申请号:CH01705/13 申请日:2013-10-04 公开日:2017-09-15 发明作者:Ryo Kuwana;Atsushi Baba;Atsushi Fushimi;Daisuke Shinma;Hideki Hanami;Isao Hara;Ito Takashi 申请人:Hitachi Ltd; IPC主号:
专利说明:
Description BACKGROUND OF THE INVENTION The present invention relates to a pressure transmitter and a transmission method, and more particularly to a pressure transmitter and a transmission method capable of measuring a fluid pressure or a pressure difference between two points in a nuclear power plant, a crude oil processing plant, and a chemical plant and transferring the detected signal are suitable. The pressure transducer transmits a fluid pressure obtained via a diaphragm to a sensor using a trapped fluid trapped in a pressure conducting path and outputs a signal detected by the sensor to the outside. There are pressure transducers that measure absolute pressure and pressure transducers that measure differential pressure. These pressure transducers are used in nuclear power plants, oil refineries and the like. For example, accuracy of ± 1% is required from the point of view of ensuring plant safety and product quality. However, because of the action of hydrogen coming from the outside of the pressure transducer, it is difficult to maintain this accuracy over a long period of time. In other words, a part of the hydrogen (hydrogen molecules, hydrogen atoms, hydrogen ions) contained in the fluid to be measured is transmitted through the membrane and then enriched in the form of gas bubbles in a trapped liquid filled in a pressure conducting path. As a result, the pressure in the Druckleitpfad increases, and it is no longer possible to transmit a change in pressure at the diaphragm error-free to the sensor, whereby the accuracy decreases. Previously, therefore, from the outside through the membrane hydrogen was suppressed by an intermediate layer was provided within the membrane in the thickness direction, which is composed of aluminum, copper, platinum and / or gold and extends approximately parallel to the surface, as for example in JP-A-9-113 394, by doubling the membrane in a pressure-receiving unit and providing a gas trap with a trapped hydrogen absorbing alloy in a gap between the two membranes, as disclosed, for example, in JP-A-2002-71494 or by providing in a pressure-receiving unit a hydrogen absorption film on the side of the trapped liquid of a membrane. Summary of the Invention In the conventional methods described above, the penetration of hydrogen from the outside through the membrane is suppressed. Thus, only with regard to the penetration of hydrogen from the outside countermeasures are taken. Hydrogen and hydrocarbons formed inside, or hydrogen that has already penetrated, are disregarded. When the trapped liquid, which has been introduced into the Druckleitpfad is decomposed by radiation or heat and hydrocarbons and hydrogen are formed, these gases accumulate in the trapped liquid. When the gases exceed a certain amount, they form gas bubbles. As a result, the pressure within the Druckleitpfads in the pressure transducer increases. This results in the problem that an allowable error accuracy (for example, an accuracy of ± 1%) of the pressure transmitter can not be maintained. In addition, to maintain accuracy, regular and irregular checks must be performed, which results in the problem of increased maintenance. In addition, an exchange is needed to maintain an accuracy of ± 1% during the inspection, which in turn leads to a problem in terms of enormous replacement costs. The present invention has been made to solve at least one of the problems described above. An object of the present invention is to provide a pressure transducer and a transfer method capable of reducing the influence of hydrogen and hydrocarbons formed inside or hydrogen coming from outside. To solve the problem, a pressure transmitter according to the invention comprises a diaphragm, a wall surface of a pressure-receiving chamber, a space formed between the diaphragm and the wall surface of the pressure-receiving chamber, pressure guide paths connected to the wall of the pressure-receiving chamber, an enclosed one Liquid trapped in the space and the pressure conducting paths to transmit a pressure received from the membrane to a sensor, and a hydrogen absorbing material contained at least in the trapped liquid, on the wall surface of the pressure receiving chamber or in a part of the path between the trapping fluid Wall surface of the pressure-receiving chamber and the sensor is provided to absorb hydrogen atoms in the trapped liquid. In particular, according to the present invention, the influence of hydrogen and hydrocarbons, which are formed inside, or hydrogen, which originates from outside, can be reduced by absorbing them using a hydrogen absorbing material. In other words, it is possible, a permissible one Accurate accuracy (for example, ± 1% accuracy) of the pressure transmitter is maintained, and the service life of the pressure transmitter can be extended. Short description of the drawings [0011] Fig. 1 is a diagram for explaining a differential pressure transducer in a pressure transducer according to a first embodiment of the present invention; Fig. 2 is a diagram for explaining a pressure transducer; Fig. 3 is a diagram for explaining a hydrogen absorption method using a hydrogen absorbing material; Fig. 4 is a diagram for explaining a method of absorbing hydrogen in a trapped liquid which is decomposed by radiation using a hydrogen absorbing material; Fig. 5 is a diagram for explaining a method for absorbing hydrogen atoms in hydrocarbons using a hydrogen absorbing material; Fig. 6 is a diagram for explaining a differential pressure transducer in which a hydrogen absorbing material in powder form is used; Fig. 7 is a diagram for explaining a differential pressure transmitter using a hydrogen absorption material in solid form; Fig. 8 is a diagram for explaining a differential pressure transducer in which a cylindrical hydrogen absorbing material in solid form is used; Fig. 9 is a diagram for explaining a differential pressure transmitter having a hydrogen absorbing material attached to a wall surface of a pressure duct; and 10 is a diagram for explaining a differential pressure transmitter having a hydrogen absorption chamber attached to a wall surface of a pressure passage. DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of the present invention will be described. A pressure transmitter according to a first embodiment will be explained in detail with reference to FIGS. 1 to 8. "1. Embodiment »Fig. 1 is a diagram for explaining a differential pressure transducer in a pressure transmitter according to a first embodiment of the present invention. In Fig. 1, a differential pressure transducer 40 for measuring a pressure difference comprises a replacement unit 10, a capillary unit 20 and a main body 30. The pressure of a measurement fluid 140 is received by two pressure-receiving membranes 50. The pressure is transmitted to a sensor 130 through an enclosed liquid 80 trapped in pressure conducting paths 60 via an intermediate membrane 70, a diaphragm seal 100 and a center diaphragm 110. The pressure detected by the sensor 130 is input to an output circuit. The output is a pressure value. In the following, the exchange unit 10 will be described. A pressure-receiving chamber 52 is a location formed by being surrounded by the pressure-receiving membrane 50 and a wall surface 51 of the pressure-receiving chamber. The pressure of the measurement fluid 140 is first received by the pressure-receiving membrane 50, transmitted to the liquid contained in the pressure-receiving chamber 52 and then transferred to the trapped liquid 80 in the Druckleitpfaden 60. Although not described in detail, the concept with respect to the diaphragm 50 is that the pressure at the chamber formed by the diaphragm and the wall surface of the pressure-receiving chamber also reaches the intermediate diaphragm 70 and the diaphragm seal 100 , In the structure described above, in all locations where the trapped liquid is trapped, pressure-conducting paths 60 and not only between the pressure-receiving membrane 50 and the intermediate membrane 70, but also in the areas of intermediate membrane 70, diaphragm seal 100th , Center diaphragm 110 and sensor 130. It is known that in the configuration described above, hydrogen entering from outside the differential pressure transducer 40 becomes gas bubbles in the trapped liquid; the resulting increase in the internal pressure of the pressure-conductive path 60 makes it impossible to properly transmit a pressure change to the pressure-receiving membrane 50 to the sensor, resulting in deteriorated measurement accuracy. In particular, when a gas amount transferred into gas bubbles within the pressure-conductive path 60 on a high-pressure side 150 is different from that of a low-pressure side 160, the pressure value deviates from the regular value. Furthermore, it has proved to be a new problem that even if due to radiation-induced or thermal decomposition of the trapped liquid hydrogen and hydrocarbons are formed inside and converted into gas bubbles, the pressure within the Druckleitpfade 60 increases and the detection precision of the sensor is lowered. Incidentally, the hydrocarbons are methane, ethane, propane and the like. Hydrogen, which originates from outside, and hydrogen and hydrocarbons, which are formed in the interior, are converted into gas bubbles, when the solubility value of the trapped liquid 80 is exceeded within the Druckleitpfade 60. In addition, gas bubbles occur to a considerable extent when the pressure of the measuring object of the pressure transducer approaches vacuum, since the solubility value decreases. In the structure described above, the differential pressure transmitter 40 can prevent the pressure increase in the Druckleitpfaden 60, which results from the storage of hydrogen and hydrocarbons as gas bubbles by both the originating from outside the differential pressure transducer 40 hydrogen and hydrogen and hydrogen atoms from hydrocarbons, which are formed inside can be absorbed by means of a hydrogen absorbing material 90, which is trapped in the Druckleitpfaden 80 or mounted in the Druckleitpfaden 60 on an inner wall. Here, pressure-conducting path 60 means the areas between the two pressure-receiving membranes in which the trapped liquid is sealed, the pressure-conducting paths 60 being shown dark in FIG. Fig. 2 is an illustration for explaining a pressure transducer. In FIG. 2, a pressure transducer 200 for measuring an absolute pressure receives a pressure of the measurement fluid 140 by means of a pressure-receiving membrane 50 and communicates the pressure to a sensor 130 using a trapped fluid 80 trapped in pressure-conductive paths 60 detected pressure is input to an output circuit and output as a pressure value. In the structure of the pressure transmitter 200 described above, when hydrogen or hydrogen derived from outside the pressure transducer 200 and hydrocarbons formed in the inside are converted into gas bubbles, the pressure in the pressure guide paths 60 deviates in the same manner as in FIG. 1 from the regular value. The increase in pressure in Druckleitpfaden 60, which results from the conversion of hydrogen and hydrocarbons in gas bubbles is prevented in the same manner as in Fig. 1 by both hydrogen and hydrogen atoms are absorbed from hydrocarbons of a hydrogen absorbing material 90, which in the Druckleitpfaden 60 is included or mounted in the Druckleitpfaden 60 on an inner wall. Fig. 3 illustrates the hydrogen absorption caused by a hydrogen absorbing material. In Fig. 3, a pictorial diagram of hydrogen absorption using palladium as an example of the hydrogen absorbing material 90 is shown. Incidentally, besides the palladium, the hydrogen absorbing material 90 may be magnesium, vanadium, titanium, manganese, zirconium, nickel, niobium, cobalt, calcium, or an alloy of these elements. Palladium has a face-centered cubic lattice. Hydrogen molecules 300 are absorbed between palladium atoms as hydrogen atoms 310. Incidentally, it is known that palladium absorbs hydrogen in a volume 935 times larger than that of palladium itself. Fig. 4 is a diagram for explaining a method of absorbing hydrogen in a trapped liquid 80 which decomposes by radiation is using a hydrogen absorption material. In Fig. 4, the method is exemplified with respect to methane 362 and hydrogen 363 described. As for the trapped liquid 80, C-H bonds and Si-C bonds in the structural formula 330 of the trapped liquid are disrupted by radiation such as gamma radiation. Resulting methyl groups 360 and hydrogen atoms 361 in case 350, in which no hydrogen absorbing material is used, bind together to form methane 362 and hydrogen 363. On the other hand, in the case where the hydrogen absorbing material is used, the unbound hydrogen atoms are absorbed on the hydrogen absorbing material 90. Accordingly, the number of bonds of methyl groups 360 and hydrogen atom 361 decreases. As a result, the formation of methane 362 can be inhibited. The methyl groups 360, which were not attached to hydrogen atoms 361, return to the trapped liquid. Thereby, the pressure increase in the Druckleitpfaden 60, which is caused by the accumulation of hydrocarbons such as methane 362 in the form of gas bubbles, can be prevented. Fig. 5 is an illustrative diagram showing a technique for absorbing hydrogen atoms in hydrocarbons using the hydrogen absorbing material. In Fig. 5, the technique relating to methane 362 is described as an example. Parts of the methyl groups 360 and the hydrogen atoms 361 are bonded together to form methane 362. As the methane 362 subsequently contacts the surface of the hydrogen absorbing material, the methane 362 dissociates into methyl groups 360 and hydrogen atoms 361. The hydrogen atoms 361 are absorbed by the hydrogen absorbing material 90 and the methyl groups 360 eventually become carbon atoms that are at the surface of the hydrogen Absorbed hydrogen absorbing material. Thereby, the pressure rise in the pressure conducting path 60 caused by the accumulation of hydrocarbons such as methane 362 in the form of gas bubbles can be prevented. Hydrogen derived from outside the pressure transducer / differential pressure transducer or hydrogen and hydrogen atoms in hydrocarbons formed in the interior may be formed by placing such hydrogen absorbing material 90 in the pressure conducting path 60 or on a wall of the pressure conducting path 60 in the pressure measuring transducer / Differential pressure transmitter is mounted in an amount of up to 935 times the volume of the hydrogen absorbing material 90 are absorbed. In this way, the increase of the internal pressure caused by the conversion of hydrogen and hydrocarbons into gas bubbles can be prevented. Fig. 6 shows a differential pressure transducer in which a powdered hydrogen absorbing material is enclosed in the pressure conducting path. With respect to locations suitable for inclusion, it is preferably enclosed in the pressure-conducting path 60 or in the exchange unit 10, the capillary unit 20 and the main part 30. However, the location for inclusion may be only the replacement unit 10 or only the replacement unit 10 and the capillary unit 20. Also in the pressure transmitter 200, the powdery hydrogen absorbing material 400 is included in the pressure conductive path 60 as in the differential pressure transducer 40. In the configuration described above, the powdery hydrogen absorbing material 400 mixes with the trapped liquid 80, thereby forming a colloidal liquid. When the particles of the powdery hydrogen absorbing material 400 are large at this time, the particles settle out. However, settling can be prevented by selecting the diameter of the particles smaller than or equal to 0.1 μm. In addition, the contact area between the powdery hydrogen absorbing material 400 and hydrogen becomes larger when the particle diameter is small, so that the rate of hydrogen absorption can be increased. Due to the powdery hydrogen absorbing material 400, it is possible to absorb hydrogen originating from outside the pressure transducer / differential pressure transducer or hydrogen and hydrogen atoms in hydrocarbons formed in the inside and to prevent the internal pressure increase caused by the conversion of hydrogen and hydrocarbons in the Druckleitpfaden is caused to gas bubbles. Fig. 7 shows a differential pressure transducer in which a solid hydrogen absorption material is used. The solid hydrogen absorbing material 410, like the powdered hydrogen absorbing material 400 shown in FIG. 6, is also included at a location within one of the pressure sensing paths 60 in the pressure transducer 40 or at locations that are a combination thereof. In the same manner as in the differential pressure transmitter 40, the hydrogen occlusion material 410 in the pressure transducer 200 is enclosed in the pressure conductive path 80. In this case, the solid hydrogen absorbing material 410 may take the form of pellets, plates or beads. In addition, when the solid hydrogen absorbing material 410 is made porous, the contact area with the hydrogen and hydrocarbons can be increased. Thus, hydrogen atoms can be absorbed more efficiently than the pelletized hydrogen absorption material of the same volume. In the above-described configuration, the hydrogen occluding material 410 in solid form may be mixed with the trapped liquid 80 in the pressure conductive paths 60. When the solid hydrogen absorbing material 410 is fixed to the wall surface 411 in the pressure conductive paths by welding, it is possible to prevent the hydrogen absorbing material 410 from respectively at the membranes such as the pressure-receiving membrane 50 or the intermediate membrane 70, or the wall surface 411 of Druckleitpfades hits and this damaged. Due to the solid hydrogen absorbing material 410, it is possible to absorb hydrogen originating from outside the pressure transducer / differential pressure transducer, or to absorb hydrogen and hydrogen atoms in hydrocarbons formed in the interior, and to prevent the internal pressure increase caused by the Conversion of hydrogen and hydrocarbons in the Druckleitpfaden is caused to gas bubbles. Fig. 8 shows a differential pressure transducer in which a cylindrical hydrogen absorbing material is used. A cylindrical hydrogen absorbing material 420 is also included in the same manner as the powdered hydrogen absorbing material 400 shown in Fig. 6 at a location within one of the pressure-transmitting paths 60 in the pressure transmitter 40 or at locations constituting a combination thereof. In the same manner as in the differential pressure transmitter 40, the cylindrical hydrogen absorbing material 420 in the pressure transmitter 200 is enclosed in the pressure conductive path 60. In the above-described arrangement, the cylindrical hydrogen absorbing material 420 may be in the form of a wire. Hydrogen absorption can be facilitated by squeezing and widening the wire and increasing the area. The contact area with the hydrogen may be further increased further by making the cylindrical hydrogen absorbing material 420 porous. The cylindrical hydrogen absorbing material 430 can be easily processed, whereby the cost can be reduced. In addition, the cylindrical hydrogen absorbing material 430 can be easily mounted in the capillary unit 20 or the like with a small diameter. In the arrangement described above, the cylindrical hydrogen absorbing material 420 can be included only in the Druckleitpfaden 60. When the cylindrical hydrogen absorbing material 420 is fixed to the wall surface 411 of the pressure conductive paths by welding (such as welding or spot welding) or gluing, it is possible to prevent the cylindrical hydrogen absorbing material 420 from hitting a diaphragm such as the pressure receiving diaphragm 50 or the intermediate diaphragm 70 , or the wall surface 411 of Druckleitpfades strikes and this damaged. Second Embodiment In Embodiment 1, the technique for confining the hydrogen absorbing material 90 in the pressure conductive paths 60 has been described. In the second embodiment, a technique of attaching the hydrogen absorbing material 90 to the wall 411 of the pressure conductive path will now be described. Fig. 9 shows a differential pressure transducer with a hydrogen absorbing material attached to the wall of Druckleitpfaden. According to this technique, a hydrogen absorbing material layer 430 is formed on the wall surface 411 of the pressure conductive path by coating the hydrogen absorbing material 90 on the wall surface 411 of the pressure conductive path by coating or vapor deposition. The present embodiment provides a method for preventing a pressure rise in the Druckleitpfaden 60, which is caused by, the conversion of hydrogen and hydrocarbons in gas bubbles, in the same manner as in the embodiment 1 from outside the differential pressure transducer 40 derived hydrogen or Hydrogen and hydrogen atoms from hydrocarbons formed in the interior are absorbed by the hydrogen absorbing material 90. This applies equally to the pressure transmitter 200. In the present embodiment, it is not necessary to change the shape or the trapped liquid as compared with the conventional pressure transducer / differential pressure transducer. There is no danger that the viscosity of the trapped liquid or the amount of trapped liquid will change. The possibility that the characteristic of pressure measurement of the pressure transducer / differential pressure transducer itself deteriorates can be minimized in comparison with the first embodiment. In the above-described embodiment, the film 430 of the hydrogen absorbing material in the differential pressure transmitter 40 should be applied to the walls 411 of the pressure conductive paths of the exchange unit 10 and the capillary unit 20, respectively, by coating or vapor deposition. However, this point may also be only the replacement unit 10 or only the replacement unit 10 and the capillary unit 20. Aside from the above-described locations, the coated or vapor-deposited site may also include a wall surface 431 of a pressure-receiving membrane on the main body side, a sidewall 432 of a pressure-receiving intermediate membrane, a sidewall 433 of an intermediate membrane on the side Page of the main part or a combination thereof. Or, the coated or evaporated areas may also be a trapped liquid side of the pressure receiving diaphragm 50, a pressure receiving side and a main body side of the intermediate diaphragm 70, and a pressure receiving side and a main body side of the center diaphragm 110 or a combination act of it. The present embodiment can also be transferred to the pressure transmitter 200 in the same way. The site to be coated or vaporized may be a trapped liquid-facing side of the pressure-receiving membrane 50 and a wall surface of the pressure-conductive path 60 or either. "Third Embodiment" In a third embodiment, a technique for absorbing hydrogen that could get into the trapped liquid or hydrogen and hydrogen atoms from hydrocarbons formed in the trapped liquid using a hydrogen absorbing material will be described which was attached to a wall of a Druckleitpfades. Fig. 10 shows a differential pressure transducer having a hydrogen absorption chamber mounted on a wall surface of a pressure conductive path. A hydrogen permeable material 441 is installed on the wall surface 411 of the pressure conductive path, and a hydrogen absorbing chamber 440 is disposed so as to cover the upper part of the wall surface 411 of the pressure conductive path. The hydrogen absorbing chamber 440 has a structure in which the hydrogen absorbing material is attached. Hydrogen or hydrogen formed in the pressure-conductive paths 60, which has penetrated from the outside, is taken in from the trapped liquid 80 by the hydrogen-permeable material 441 and brought into the hydrogen absorption chamber 440. The transferred hydrogen is absorbed by the hydrogen absorbing material 90 mounted in the hydrogen absorbing chamber 440. In this way, the increase in internal pressure in the pressure lead paths caused by a conversion of hydrogen into gas bubbles can increase
权利要求:
Claims (7) [1] 60 are prevented. In addition, in a top wall of the hydrogen absorption chamber 440, a lid 442 for opening / closing is provided. As a result, it is possible to exchange the hydrogen absorbing material 90 located in the hydrogen absorbing chamber 440. Thus, the service life of the pressure transducer / differential pressure transducer can be extended, and moreover, hydrogen atoms can be easily absorbed even in a high hydrogen concentration environment in which hydrogen can not be fully absorbed in other embodiments. In the structure described above, the hydrogen-permeable material 441 may be palladium, vanadium, tantalum, niobium, zirconium or the like. With respect to the mounting locations of the hydrogen absorbing chamber 440, the hydrogen permeable material 441 and the hydrogen absorbing material 90, they may be mounted anywhere in the structure described above as long as the location is on the wall surface 411 of the pressure conducting path. In addition, the hydrogen absorbing material 90 may be powdery, solid or cylindrical. In addition, the hydrogen absorbing material 90 may be applied to an inner wall of the hydrogen absorbing chamber 440 by coating or vapor deposition. Fourth Embodiment In a fourth embodiment, a method is described in which a part or all of the materials used are formed by the hydrogen absorbing material. In this embodiment, the hydrogen absorbing material 90 is used as part or all of the materials used, such as the exchange unit 10 and the capillary unit 20. In this way, parts which are installed separately for the purpose of hydrogen absorption in the pressure transmitter / differential pressure transmitter, become superfluous. By the construction described above, it is possible to prevent a pressure increase caused by the conversion of hydrogen and hydrocarbons in gas bubbles in the Druckleitpfaden by hydrogen, which penetrates from outside of the differential pressure transducer 40, or hydrogen and hydrogen atoms in hydrocarbons in the Inner can be absorbed using the hydrogen absorbing material 90. This applies equally to the pressure transmitter 200th Claims A pressure transducer (200/40) comprising: a diaphragm (50); a wall surface (51) of a pressure receiving chamber; a space (52) formed between the diaphragm and the wall surface of the pressure-receiving chamber; Pressure guide paths (60) connected to the wall of the pressure receiving chamber; an enclosed liquid (80) trapped in the space and the pressure conducting paths for transmitting the pressure received at the membrane to a sensor (130); and a hydrogen absorbing material (90) provided at least in the trapped liquid, on the wall surface of the pressure receiving chamber, or in part of the path between the wall surface of the pressure receiving chamber and the sensor to absorb hydrogen atoms in the trapped liquid entrapped liquid (80) includes hydrocarbon compounds, the hydrogen absorbing material (90) can absorb a hydrogen atom dissociated from the hydrocarbon compounds, and a surface of the hydrogen absorbing material (90) can absorb a carbon atom of the hydrocarbon compounds. [2] 2. A pressure transmitter according to claim 1, wherein the hydrogen absorbing material is palladium, magnesium, vanadium, titanium, manganese, zirconium, nickel, Mob, cobalt, calcium or an alloy of the recited elements. [3] 3. Pressure transmitter according to claim 1 or 2, wherein the hydrogen absorbing material (90) is enclosed in powder or in cylindrical form in Druckleitpfad or is present as a film on the walls of the Druckleitpfade. [4] 4. A pressure transmitter according to any one of claims 1 to 3, wherein the pressure transducer for measuring a pressure difference between a high pressure side (150) and a low pressure side (160) is formed, the membrane in the form of a pair of first membranes (50), the pressures of a measuring fluid, and a pair of second diaphragms (110) capable of receiving the pressures of the first diaphragms, the trapped liquid (80) for transmitting pressures received from the first diaphragms and transmitting Formed by the second diaphragms, the sensor (130) is adapted to detect a difference between the pressures transmitted from the measuring fluid (s), a circuit (120) for amplifying a signal is formed by the sensor, and the hydrogen absorbing material (90) within the Druckleitpfade (60), on wall surfaces of Druckl paths, of the first membranes on the side of a main part (30), on the first membranes on the side of the trapped liquid or on the second membranes or in places resulting from combination of said places. [5] 5. A pressure transmitter according to claim 4, wherein third membranes and fourth membranes are provided between the first membranes and second membranes, and the hydrogen absorbing material (90) on pressure receiving sides of the third membranes, on the third membranes on the side of the trapped liquid, pressure receiving sides of the fourth Membranes or on the fourth membranes on the side of the trapped liquid or at locations resulting from combination of said locations is provided. [6] A pressure transmitter according to claim 4 or 5, wherein a powdered hydrogen absorbing material (400), a solid hydrogen absorbing material (410) or a cylindrical hydrogen absorbing material (420) acting as the hydrogen absorbing material (90) are enclosed in the pressure conducting paths (60) and / or attached to the Druckleitpfaden (60). [7] 7. A method for transmitting a pressure by means of a pressure transducer, comprising: providing a pressure transducer according to one of claims 1 to 6; Transferring a pressure received from a membrane (50) to an enclosed liquid (80) in a space (52) formed between the membrane and a wall surface (51) of a pressure-receiving chamber; Transferring the pressure transferred to the space to a liquid trapped in pressure conducting paths (60) connected to the wall surface of the pressure receiving chamber.
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同族专利:
公开号 | 公开日 JP2014089171A|2014-05-15| DE102013110968A1|2014-04-10| JP6018945B2|2016-11-02| US20140096613A1|2014-04-10| US9140620B2|2015-09-22| CH707090A2|2014-04-15|
引用文献:
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法律状态:
2017-01-13| AZW| Rejection (application)| 2017-10-31| PK| Correction|Free format text: BERICHTIGUNG INHABER |
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